Авторы: Vladimir Emel’yanov, Dmitry Seval’nev
Plasma-driven instability of quasi-lamb elastic modes as a mechanism of laser-induced micropatterning of a silicon surface with a silicon dioxide cap
30, N 1 (2009)
A model of the electron-hole plasma driven instability of quasi-Lamb elastic modes in semiconductor with dioxide cap is developed and applied for description of laser-induced micropatterning of semiconductor surface. A good correspondence of theoretical and experimental results is obtained.
Назад в раздел